Point-of-use photochemical filter with superior contaminant retention and low hold-up volume performance in sub-10 - 180 nm technology nodes.
- Cost-effective, scalable and convenient alternative for testing and particle evaluation of process chemicals
- Optimized filter improves filtration of photoresists and other process chemicals without releasing retained particles back into the process
- No prewetting required for UPE membrane reduces the potential sources of microbubble formation and avoids problems associated with incomplete wetting and the mixing of incompatible chemicals
在亞10 - 180納米技術節(jié)點中，使用點光化學過濾器具有卓越的污染物截留和低滯留體積性能。用于工藝化學品測試和顆粒評估的經(jīng)濟、可擴展且方便的替代方案優(yōu)化的過濾器改善了光刻膠和其他工藝化學品的過濾，而不會將殘留顆粒釋放回工藝中UPE膜不需要預潤濕減少了微氣泡形成的潛在來源，并避免了與不完全潤濕和不相容化學品混合相關的問題
